The use of MEMS-based technologies for producing scanning mirrors enables its batch production with a consequent increase in the throughput and a decrease in the manufacturing costs per device. However, the use of Silicon as a structural material could introduce non-linearities in the device behavior due to the variation of its mechanical properties according to the crystalline orientation. The orthotropic properties when taken into account in the finite element model of the device could enhance the accuracy in the design of micromachined scanning mirrors. The model used in this paper does not take into account the orthotropic behavior, however, satisfactory results were obtained. To validate the finite element model, a modal analysis of the device was performed using the Laser Doppler Vibrometry method. The normal modes of the structure were identified and the results agree well with the finite element model. This work presents the FE model and experimental modal analysis results of a Silicon micromachined double-rotor scanning mirror.

Uma nova técnica de fabricação de dispositivos fluídicos miniaturizados foi desenvolvida, usando-se uma foto-resina baseada nos oligômeros uretana e acrilato (UA), usados na indústria gráfica para a confecção de clichês de impressoras flexográficas. Foram fabricados módulos de misturadores e reatores fluídicos medindo 10×10 mm², providos de canais com largura variando de 0,25 a 1,00 mm por 0,75 mm de profundidade. Tampas de 4,00 mm de espessura, contendo orifícios de 1,26 mm de diâmetro para a entrada e saída do fluido, foram usadas para selar os canais empregando-se um filme de foto-resina como adesivo. Interconexões de tubos de aço foram fixadas aos orifícios de entrada e saída do fluido. Todos os módulos fluídicos foram fabricados por fotolitografia, selados por cura no ultravioleta (UV) de uma camada de adesão de UA, empacotados usando a foto-resina, e suportaram, sem vazamentos, uma pressão de ar de 2×10(5) Pascal.

A new technique of fabrication of miniaturized fluidic devices was developed using a photoresin based on urethane and acrylate (UA) oligomers used to platemaking for flexographic printers on graphic industry. Fluidic mixers and reactors modules measuring 10×10 mm² were manufactured, with channels width in the 0.25 to 1.00 mm range and 0.75 mm depth. Top covers 4.00 mm thick, with 1.26 mm diameter inlet and outlet holes were used to seal the channels. The sealed channel structures were formed using a film of photoresin as adhesive. Interconnections of 1.20 mm diameter and 10 mm long steel tubes were fixed into inlet and outlet holes. All fluidic modules were manufactured by photolithography of UA, sealed by ultraviolet cure of an UA adhesion layer, package in an UA container and successfully tested for leakage under 2×10(5) Pascal air pressure.